Gentle PLASMA CLEANER
The SPC150 is a high-vacuum, gentle plasma cleaner designed for precise cleaning and surface treatment of TEM samples and TEM holders.
ICP-RF Technology
Oil-Free and Compace
Gentle Plasma Cleaning
SPC150 Plasma Cleaner
It features three gas path Mass Flow Controllers (MFCs) for accurate gas flow control. The remote RF ion source generates a mild plasma, allowing for the effective removal of organic and silicon contaminants from samples and sample rods, while also facilitating surface activation and hydrophilization.
Key Features:
Precise Gas Flow Control: Equipped with three gas path MFCs for accurate regulation of gas flow, ensuring consistent and effective cleaning.
Gentle Plasma Treatment: The RF ion source produces a mild plasma, making it ideal for delicate and sensitive materials, while minimizing the risk of damage.
Efficient Cleaning Mechanism: A grid between the ion source and the sample chamber enhances cleaning by preventing direct plasma bombardment, protecting fragile samples.
Touchscreen Automatic Control: Features an intuitive touchscreen interface for easy operation with a plug-and-play setup.
Specialized Applications: Particularly suitable for cleaning hydrocarbon and silicon contamination from ultrathin carbon films and for plasma treatment of fragile TEM specimens.
The SPC150 offers precise and reliable cleaning, making it an excellent choice for laboratories handling sensitive and delicate samples.
Technical Specifications | Parameters |
Vacuum Pump System | Turbo P ump and Oil-free Diaphragm Pump |
Turbo Pump Inlet Flange | DN63ISO-K (Standard) |
Turbo Pump Speed | >85L/s (N2) |
Diaphragm Pump Speed | >0.7m3/h |
Ultimate vacuum | <5E-4Pa |
Pump System Start-up Time | ≤300s |
TEM Holder Accessories | Compatible with Thermo, JEOL, Hitachi Sample Holders; Supports 2 or More TEM Holders |
Chamber Dimension | 160*100 mm |
Plasma Cleaning Source | The Principle of Remote RF Source, Manual Matching |
RF Power Supply | 13.56MHz RF Power, Adjustable from 5W to 50W |
Gas Control | 3-way MFC control, and can be connected to gases like Ar, O2, and H2 |
Vacuum Gauge | Full-range Compound Gauge |
Operating method | Touchscreen Control with the Control System Providing Interlock Protection Functions |
Dimensions | 500mm * 466mm * 390mm |
Power Supply | 100-220V AC, 50/60Hz Grounded Three-prong Plug |
Power Consumption | <500W |
Warranty | One year |
Remarks | The above-listed technical specifications and parameters are subject to updates without further notice. Contact us if you have any questions. |
Prod# | Description | Unit | Price | Order/Quote |
---|---|---|---|---|
SPC 150 | Plasma Cleaner | each | P.O.R | Qty: Add to cart |