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Gentle PLASMA CLEANER

The SPC150 is a high-vacuum, gentle plasma cleaner designed for precise cleaning and surface treatment of TEM samples and TEM holders. 

ICP-RF Technology

Oil-Free and Compace

Gentle Plasma Cleaning

>   Description

SPC150 Plasma Cleaner

It features three gas path Mass Flow Controllers (MFCs) for accurate gas flow control. The remote RF ion source generates a mild plasma, allowing for the effective removal of organic and silicon contaminants from samples and sample rods, while also facilitating surface activation and hydrophilization.

Key Features:

  • Precise Gas Flow Control: Equipped with three gas path MFCs for accurate regulation of gas flow, ensuring consistent and effective cleaning.

  • Gentle Plasma Treatment: The RF ion source produces a mild plasma, making it ideal for delicate and sensitive materials, while minimizing the risk of damage.

  • Efficient Cleaning Mechanism: A grid between the ion source and the sample chamber enhances cleaning by preventing direct plasma bombardment, protecting fragile samples.

  • Touchscreen Automatic Control: Features an intuitive touchscreen interface for easy operation with a plug-and-play setup.

  • Specialized Applications: Particularly suitable for cleaning hydrocarbon and silicon contamination from ultrathin carbon films and for plasma treatment of fragile TEM specimens.


The SPC150 offers precise and reliable cleaning, making it an excellent choice for laboratories handling sensitive and delicate samples.



Technical  Specifications

Parameters

Vacuum Pump System

 Turbo P ump and Oil-free Diaphragm Pump

Turbo Pump Inlet Flange

 DN63ISO-K (Standard)

Turbo Pump Speed

 >85L/s (N2)

Diaphragm Pump Speed

 >0.7m3/h

Ultimate vacuum

 <5E-4Pa

Pump System Start-up Time

 ≤300s

TEM Holder Accessories

 Compatible with Thermo, JEOL, Hitachi Sample Holders; Supports 2 or More TEM Holders

Chamber Dimension

 160*100 mm

Plasma Cleaning Source

 The Principle of Remote RF Source, Manual Matching

RF Power Supply

 13.56MHz RF Power, Adjustable from 5W to 50W

Gas Control

 3-way MFC control, and can be connected to gases like Ar, O2, and H2

Vacuum Gauge

 Full-range Compound Gauge

Operating method

 Touchscreen Control with the Control System Providing Interlock Protection Functions

Dimensions

 500mm * 466mm * 390mm

Power Supply

 100-220V AC, 50/60Hz Grounded Three-prong Plug

Power Consumption

 <500W

Warranty

 One year

   Remarks

 The above-listed technical specifications and parameters are subject to updates without further notice. Contact us if you have any questions.


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Plasma Cleaner

Prod# Description Unit Price
SPC 150 Plasma Cleaner each P.O.R
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